Dr. Sylvain J. P. David
at UJF
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 8 October 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Wafer-level optics, Carbon, Lithography, Electron beam lithography, Contamination, Chemical species, Scanning electron microscopy, Chemical analysis, Semiconducting wafers, Chemically amplified resists

Proceedings Article | 8 March 2014
Proc. SPIE. 8990, Silicon Photonics IX
KEYWORDS: Indium gallium arsenide, Luminescence, Germanium, Interfaces, Gallium arsenide, Silicon, Semiconductor lasers, Scanning electron microscopy, Wet etching, Silicon photonics

Proceedings Article | 15 September 2004
Proc. SPIE. 5450, Photonic Crystal Materials and Nanostructures
KEYWORDS: Oxides, Polarization, Luminescence, Silicon, Diffusion, Photonic crystals, Photonic integrated circuits, Optical microcavities, Molecular self-assembly, Plasma

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