Dr. Sylvain Petitgrand
at Fogale Nanotech
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 29 August 2005
Proc. SPIE. 5858, Nano- and Micro-Metrology
KEYWORDS: Optical filters, Fringe analysis, Anisotropic filtering, Modulation, Microscopy, Fourier transforms, Interferometry, Phase shift keying, Demodulation, Binary data

Proceedings Article | 13 June 2005
Proc. SPIE. 5856, Optical Measurement Systems for Industrial Inspection IV
KEYWORDS: Microelectromechanical systems, Microscopes, Light sources, Etching, Microscopy, Silicon, Interferometry, 3D metrology, Objectives, Phase measurement

Proceedings Article | 17 August 2004
Proc. SPIE. 5458, Optical Micro- and Nanometrology in Manufacturing Technology
KEYWORDS: Nanotechnology, Mirrors, Light sources, Fringe analysis, Statistical analysis, Fourier transforms, Interferometry, Demodulation, 3D metrology, Phase shifts

Proceedings Article | 3 October 2003
Proc. SPIE. 5145, Microsystems Engineering: Metrology and Inspection III
KEYWORDS: Microelectromechanical systems, Image processing, Video, Microscopy, Image resolution, Gaussian filters, Vibrometry, Optical flow, Motion measurement, Motion estimation

Proceedings Article | 3 October 2003
Proc. SPIE. 5145, Microsystems Engineering: Metrology and Inspection III
KEYWORDS: Microelectromechanical systems, Refractive index, Light sources, Reflection, Video, Interfaces, Silicon, Interferometry, 3D metrology, Objectives

Showing 5 of 9 publications
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