Tao Ge
at 1616 E Seneca St
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | August 20, 2015
Proc. SPIE. 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII
KEYWORDS: Mirrors, Phase contrast, Waveguides, Imaging systems, Microscopy, Objectives, Photomasks, Optical alignment, Optical interconnects, Semiconducting wafers

PROCEEDINGS ARTICLE | April 17, 2015
Proc. SPIE. 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
KEYWORDS: Lithography, Mirrors, Waveguides, Cladding, Silicon, Chromium, Photomasks, Integrated optics, Optical alignment, Thin film coatings

PROCEEDINGS ARTICLE | March 13, 2015
Proc. SPIE. 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
KEYWORDS: Lithography, Microscopes, Mirrors, Phase contrast, Waveguides, Imaging systems, Polymers, Objectives, Optical alignment, Optical interconnects

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
KEYWORDS: Fabrication, Lithography, Mirrors, Optical circuits, Photoresist materials, Micro optics, Photomasks, Integrated optics, Double patterning technology, Optical alignment

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