Tao Ge
at James C Wyant College of Optical Sciences
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 20 August 2015
Proc. SPIE. 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII
KEYWORDS: Waveguides, Imaging systems, Mirrors, Optical alignment, Phase contrast, Microscopy, Photomasks, Semiconducting wafers, Optical interconnects, Objectives

Proceedings Article | 17 April 2015
Proc. SPIE. 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
KEYWORDS: Waveguides, Mirrors, Photomasks, Optical alignment, Thin film coatings, Lithography, Cladding, Integrated optics, Silicon, Chromium

Proceedings Article | 13 March 2015
Proc. SPIE. 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
KEYWORDS: Imaging systems, Phase contrast, Optical alignment, Mirrors, Polymers, Lithography, Optical interconnects, Waveguides, Microscopes, Objectives

Proceedings Article | 7 March 2014
Proc. SPIE. 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
KEYWORDS: Lithography, Mirrors, Optical circuits, Optical alignment, Photomasks, Fabrication, Integrated optics, Micro optics, Photoresist materials, Double patterning technology

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