Tetsuo Hayakawa
at Canare Electric Co Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 25 April 2008
Proc. SPIE. 6993, MEMS, MOEMS, and Micromachining III
KEYWORDS: Optical components, Optical filters, Indium gallium arsenide, Etching, Reflectivity, Doping, Wet etching, Tunable filters, Electronic filtering, Arsenic

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