Dr. Toshiro Itani
at National Institute of AIST
SPIE Involvement:
Conference Chair | Editor | Author
Publications (144)

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12498, 1249814 (2023) https://doi.org/10.1117/12.2657889
KEYWORDS: Extreme ultraviolet lithography, Electron beam lithography, FT-IR spectroscopy, Lithography, Silicon, Film thickness

Proceedings Article | 16 March 2021 Presentation + Paper
Proceedings Volume 11609, 116090W (2021) https://doi.org/10.1117/12.2583753
KEYWORDS: Extreme ultraviolet lithography, Scanning electron microscopy, Photoresist processing, Extreme ultraviolet, Optical lithography, Medium wave, Line width roughness, Line edge roughness, Semiconductors, Lithography

Proceedings Article | 14 October 2020 Poster + Presentation + Paper
Julius Joseph Santillan, Masahiko Harumoto, Harold Stokes, Chisayo Mori, Yuji Tanaka, Tomohiro Motono, Masaya Asai, Toshiro Itani
Proceedings Volume 11517, 1151718 (2020) https://doi.org/10.1117/12.2572771
KEYWORDS: Stochastic processes, Photoresist processing, Extreme ultraviolet lithography, Optical lithography, Standards development, Bridges, Line width roughness, Lithography

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11327, 113271B (2020) https://doi.org/10.1117/12.2551894
KEYWORDS: Optical lithography, Excimer lasers, Laser applications, Laser systems engineering, Laser ablation, Semiconductors, Packaging

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11323, 113231W (2020) https://doi.org/10.1117/12.2551891
KEYWORDS: Extreme ultraviolet lithography, Photoresist processing, Optical lithography, Semiconductors, Lithography

Showing 5 of 144 publications
Proceedings Volume Editor (7)