Dr. Toshiro Itani
at Institute of Scientific and Industrial Research
SPIE Involvement:
Conference Chair | Author | Editor
Publications (141)

Proceedings Article | 23 March 2020
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Packaging, Semiconductors, Optical lithography, Laser applications, Laser ablation, Excimer lasers, Laser systems engineering

Proceedings Article | 23 March 2020
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Semiconductors, Lithography, Optical lithography, Extreme ultraviolet lithography, Photoresist processing

Proceedings Article | 28 June 2019
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Oxides, Nanoparticles, Metals, X-rays, Reflectivity, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Zirconium dioxide

Proceedings Article | 12 October 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Oxides, Nanoparticles, Polymers, Metals, Diffusion, Extreme ultraviolet lithography, Line edge roughness, Zirconium dioxide, Stochastic processes, Chemically amplified resists

Proceedings Article | 19 March 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Oxides, Nanoparticles, Polymers, Metals, Diffusion, Extreme ultraviolet lithography, Line edge roughness, Zirconium dioxide, Stochastic processes, Chemically amplified resists

Showing 5 of 141 publications
Proceedings Volume Editor (3)

SPIE Conference Volume | 15 November 2019

SPIE Conference Volume | 23 November 2018

SPIE Conference Volume | 29 November 2017

Conference Committee Involvement (5)
International Conference on Extreme Ultraviolet Lithography 2020
20 September 2020 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2019
16 September 2019 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2018
17 September 2018 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography
11 September 2017 | Monterey, California, United States
Advances in Resist Technology and Processing XX
24 February 2003 | Santa Clara, California, United States
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