Dr. Toshiro Itani
at EIDEC Inc
SPIE Involvement:
Conference Chair | Conference Program Committee | Editor | Author
Publications (140)

SPIE Conference Volume | November 23, 2018

PROCEEDINGS ARTICLE | October 12, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Oxides, Nanoparticles, Polymers, Metals, Diffusion, Extreme ultraviolet lithography, Line edge roughness, Zirconium dioxide, Stochastic processes, Chemically amplified resists

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Oxides, Nanoparticles, Polymers, Metals, Diffusion, Extreme ultraviolet lithography, Line edge roughness, Zirconium dioxide, Stochastic processes, Chemically amplified resists

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Lithography, Metals, Infrared lasers, Infrared radiation, Extreme ultraviolet, Extreme ultraviolet lithography, Scientific research, Photoresist processing, Free electron lasers, Photoresist developing

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Metals, Atomic force microscopy, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Analytical research, Photoresist processing

SPIE Conference Volume | November 29, 2017

Showing 5 of 140 publications
Conference Committee Involvement (4)
International Conference on Extreme Ultraviolet Lithography 2019
15 September 2019 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2018
17 September 2018 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography
11 September 2017 | Monterey, California, United States
Advances in Resist Technology and Processing XX
24 February 2003 | Santa Clara, California, United States
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