Dr. Ta-Tung Chen
at Chung Cheng Institute of Tech
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 12, 2005
Proc. SPIE. 5713, Photon Processing in Microelectronics and Photonics IV
KEYWORDS: Amorphous silicon, Thin films, Annealing, Silicon, Laser processing, Semiconductor lasers, Laser irradiation, Silicon films, Solids, Excimer lasers

PROCEEDINGS ARTICLE | April 12, 2005
Proc. SPIE. 5713, Photon Processing in Microelectronics and Photonics IV
KEYWORDS: Carbon, Diamond, Polishing, Surface roughness, Chemical vapor deposition, Scanning electron microscopy, Laser ablation, Excimer lasers, Photomicroscopy, Surface finishing

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