Dr. Ta-Tung Chen
at Chung Cheng Institute of Tech
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 12, 2005
Proc. SPIE. 5713, Photon Processing in Microelectronics and Photonics IV
KEYWORDS: Amorphous silicon, Silicon, Excimer lasers, Laser processing, Semiconductor lasers, Laser irradiation, Thin films, Silicon films, Annealing, Solids

PROCEEDINGS ARTICLE | April 12, 2005
Proc. SPIE. 5713, Photon Processing in Microelectronics and Photonics IV
KEYWORDS: Diamond, Laser ablation, Chemical vapor deposition, Scanning electron microscopy, Excimer lasers, Carbon, Photomicroscopy, Polishing, Surface roughness, Surface finishing

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