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Tadanobu Arimura
at Taiyo Nippon Sanso Tsukuba Lab.
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Author
Publications (2)
Proceedings Article | 5 March 2021 Presentation
Current development status of MOCVD and its process for UVLED application towards post COVID-19
Akinori Ubukata, Yoshiki Yano, Junya Yoshinaga, Tadanobu Arimura, Shuichi Koseki, Koh Matsumoto
Proceedings Volume 11706, 117060L (2021) https://doi.org/10.1117/12.2585099
KEYWORDS: Metalorganic chemical vapor deposition, Ultraviolet radiation, Mercury (planet), Light emitting diodes, Lamps, Contamination, Chlorine, Sapphire, Optical components, Nitrogen
Proceedings Article | 25 February 2020 Presentation + Paper
Challenges and opportunities of MOVPE and THVPE/HVPE for nitride light emitting device
K. Matsumoto, A. Yamaguchi, Y. Yano, H. Tokunaga, A. Mishima, Y. Tomita, Y. Yamaoka, S. Koseki, T. Arimura
Proceedings Volume 11302, 113020N (2020) https://doi.org/10.1117/12.2543943
KEYWORDS: Gallium nitride, Light emitting diodes, Aluminum nitride, Semiconducting wafers, Sapphire, Crystals, Quantum wells, Indium, External quantum efficiency, Annealing
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