Prof. Tadatomo Suga Profile

Prof. Tadatomo Suga

at Univ of Tokyo

SPIE Involvement:

Author

Publications (9)

SPIE Journal Paper | 1 October 2010

Comparative annealing effect on bonded wafers in air and ultrahigh vacuum for microelectromechanical systems/microfluidics packaging

Matiar Howlader, Tadatomo Suga

JM3, Vol. 9, Issue 04, 041107, (October 2010) https://doi.org/10.1117/12.10.1117/1.3500747

KEYWORDS: Interfaces, Silicon, Annealing, Semiconducting wafers, Plasma, Microelectromechanical systems, Reactive ion etching, Packaging, Oxides, Microfluidics

Read Abstract +

Proceedings Article | 18 October 2006 Paper

Low-temperature bonding of a LiNbO3 waveguide chip to a Si substrate in ambient air for hybrid-integrated optical devices

Ryo Takigawa, Eiji Higurashi, Tadatomo Suga, Satoshi Shinada, Tetsuya Kawanishi

Proceedings Volume 6376, 637603 (2006) https://doi.org/10.1117/12.690741

KEYWORDS: Silicon, Gold, Thin films, Optical components, Plasma, Scanning electron microscopy, Waveguides, Argon, Silicon films, Temperature metrology

Read Abstract +

Proceedings Article | 6 December 2005 Paper

Low temperature bonding of LiNbO₃ waveguide chips to Si substrates in air

Ryo Takigawa, Eiji Higurashi, Tadatomo Suga, Satoshi Shinada, Tetsuya Kawanishi

Proceedings Volume 6050, 605012 (2005) https://doi.org/10.1117/12.653072

KEYWORDS: Silicon, Plasma, Waveguides, Gold, Argon, Semiconducting wafers, Interfaces, Titanium, Integrated optics, Optical fibers

Read Abstract +

Proceedings Article | 12 April 2005 Paper

Mechanical properties of lead-free solder alloys evaluated by miniature size specimen

Yoshiharu Kariya, Tsuyoshi Asai, Tadatomo Suga

Proceedings Volume 5852, (2005) https://doi.org/10.1117/12.621538

KEYWORDS: Dendrites, Tin, Solids, Copper, Sensors, Experimental mechanics, Polishing, Materials science, Reliability, Electronic components

Read Abstract +

Proceedings Article | 25 October 2004 Paper

Hybrid integration technologies for optical micro-systems

Eiji Higurashi, T. Itoh, Tadatomo Suga, R. Sawada

Proceedings Volume 5604, (2004) https://doi.org/10.1117/12.580079

KEYWORDS: Optical alignment, Waveguides, Silicon, Sensors, Blood circulation, Integrated optics, Optical components, Semiconductor lasers, Tissue optics, Computer programming

Read Abstract +

Proceedings Article | 16 February 2004 Paper

Structure and properties of fullerene nanowhiskers prepared by the liquid-liquid interfacial precipitation method

Kun'ichi Miyazawa, Masahisa Fujino, Jun-ichi Minato, Tetsuro Yoshii, Tokushi Kizuka, Tadatomo Suga

Proceedings Volume 5648, (2004) https://doi.org/10.1117/12.581307

KEYWORDS: Fullerenes, Crystals, Molecules, Ferroelectric materials, Transmission electron microscopy, Interfaces, Silicon, Electron beams, FT-IR spectroscopy, Scanning electron microscopy

Read Abstract +

Proceedings Article | 13 November 2002 Paper

Resonant-type microscanners fabricated by hybrid PZT deposition process on SOI wafers

Jiunn-Jye Tsaur, Zhanjie Wang, Lulu Zhang, Masaaki Ichiki, Ryutaro Maeda, Tadatomo Suga

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.469675

KEYWORDS: Ferroelectric materials, Mirrors, Sol-gels, Silicon, Laser ablation, Semiconducting wafers, Silicon films, Polarization, Actuators, Scanning electron microscopy

Read Abstract +