Prof. Tadatomo Suga
at Univ of Tokyo
SPIE Involvement:
Author
Publications (9)

SPIE Journal Paper | 1 October 2010
JM3 Vol. 9 Issue 04
KEYWORDS: Interfaces, Silicon, Annealing, Semiconducting wafers, Plasma, Microelectromechanical systems, Reactive ion etching, Packaging, Oxides, Microfluidics

Proceedings Article | 18 October 2006 Paper
Proc. SPIE. 6376, Optomechatronic Micro/Nano Devices and Components II
KEYWORDS: Gold, Optical components, Thin films, Waveguides, Argon, Silicon, Scanning electron microscopy, Silicon films, Temperature metrology, Plasma

Proceedings Article | 6 December 2005 Paper
Proc. SPIE. 6050, Optomechatronic Micro/Nano Devices and Components
KEYWORDS: Gold, Optical fibers, Titanium, Waveguides, Argon, Interfaces, Silicon, Integrated optics, Semiconducting wafers, Plasma

Proceedings Article | 12 April 2005 Paper
Proc. SPIE. 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics
KEYWORDS: Polishing, Sensors, Copper, Reliability, Electronic components, Materials science, Solids, Experimental mechanics, Dendrites, Tin

Proceedings Article | 25 October 2004 Paper
Proc. SPIE. 5604, Optomechatronic Micro/Nano Components, Devices, and Systems
KEYWORDS: Optical components, Waveguides, Sensors, Silicon, Computer programming, Semiconductor lasers, Blood circulation, Integrated optics, Optical alignment, Tissue optics

Showing 5 of 9 publications
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