Prof. Tadatomo Suga
at Univ of Tokyo
SPIE Involvement:
Author
Publications (9)

SPIE Journal Paper | October 1, 2010
JM3 Vol. 9 Issue 04
KEYWORDS: Interfaces, Silicon, Annealing, Semiconducting wafers, Plasma, Microelectromechanical systems, Reactive ion etching, Packaging, Oxides, Microfluidics

PROCEEDINGS ARTICLE | October 18, 2006
Proc. SPIE. 6376, Optomechatronic Micro/Nano Devices and Components II
KEYWORDS: Gold, Optical components, Thin films, Waveguides, Argon, Silicon, Scanning electron microscopy, Silicon films, Temperature metrology, Plasma

PROCEEDINGS ARTICLE | December 6, 2005
Proc. SPIE. 6050, Optomechatronic Micro/Nano Devices and Components
KEYWORDS: Gold, Optical fibers, Titanium, Waveguides, Argon, Interfaces, Silicon, Integrated optics, Semiconducting wafers, Plasma

PROCEEDINGS ARTICLE | April 12, 2005
Proc. SPIE. 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics
KEYWORDS: Polishing, Sensors, Copper, Reliability, Electronic components, Materials science, Solids, Experimental mechanics, Dendrites, Tin

PROCEEDINGS ARTICLE | October 25, 2004
Proc. SPIE. 5604, Optomechatronic Micro/Nano Components, Devices, and Systems
KEYWORDS: Optical components, Waveguides, Sensors, Silicon, Computer programming, Semiconductor lasers, Blood circulation, Integrated optics, Optical alignment, Tissue optics

PROCEEDINGS ARTICLE | February 16, 2004
Proc. SPIE. 5648, Smart Materials III
KEYWORDS: Electron beams, Ferroelectric materials, FT-IR spectroscopy, Molecules, Crystals, Interfaces, Silicon, Scanning electron microscopy, Transmission electron microscopy, Fullerenes

Showing 5 of 9 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top