Tae Hoon Park
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 14, 2018
Proc. SPIE. 10532, Gallium Nitride Materials and Devices XIII
KEYWORDS: Packaging, Light emitting diodes, Deep ultraviolet, Electrodes, Glasses, Ultraviolet radiation, Resistance, Transmittance, Aluminum nitride, Electrical breakdown

PROCEEDINGS ARTICLE | March 22, 2010
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Semiconductors, Lithography, Electronics, Cadmium, Scanners, 3D modeling, Scanning electron microscopy, Photomasks, Optical proximity correction, Semiconducting wafers

PROCEEDINGS ARTICLE | May 12, 2004
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Thin films, Lithography, Lithographic illumination, Scanners, Photomasks, Optical proximity correction, SRAF, Nanoimprint lithography, Semiconducting wafers, Model-based design

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