Dr. Tae-Hwan Oh
Principal Engineer at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Publications (10)

Proceedings Article | 21 November 2023 Presentation + Paper
Proceedings Volume 12750, 127500B (2023) https://doi.org/10.1117/12.2687461
KEYWORDS: Extreme ultraviolet lithography, Critical dimension metrology, Stochastic processes, Optical lithography, Bridges, Scanning electron microscopy, Resistance, Photoresist materials, Extreme ultraviolet, Metals

Proceedings Article | 24 March 2017 Presentation + Paper
Proceedings Volume 10143, 101431G (2017) https://doi.org/10.1117/12.2261216
KEYWORDS: Optical lithography, Extreme ultraviolet lithography, Extreme ultraviolet, Lithography, Materials processing, Photoresist processing, Etching, Metals, Quantum efficiency, Photoresist materials, Interfaces, Silicon

Proceedings Article | 29 March 2013 Paper
Tae-Hwan Oh, Tae-Sun Kim, Yura Kim, Jahee Kim, Sujeong Heo, Bumjoon Youn, Jaekyung Seo, Kwang-Sub Yoon, Byoung-il Choi
Proceedings Volume 8682, 86820P (2013) https://doi.org/10.1117/12.2011426
KEYWORDS: Photoresist processing, Lithography, Photomasks, Optical lithography, Logic devices, Image processing, Ion implantation, Chemically amplified resists, Scanning electron microscopy, Nanoimprint lithography

Proceedings Article | 31 March 2010 Paper
Tae-Hwan Oh, Yunsuk Nam, Chansam Chang, Suhyun Kim, Minkeun Kwak, Dongsu Kim, Hongjae Shin, Nae-In Lee, Jongshik Yoon
Proceedings Volume 7639, 763927 (2010) https://doi.org/10.1117/12.846478
KEYWORDS: Photoresist processing, Silicon, Lithography, Critical dimension metrology, Immersion lithography, Silicon carbide, Carbon, Logic devices, Control systems, Photomasks

Proceedings Article | 19 May 2009 Paper
Tae-Hwan Oh, Yunsuk Nam, Suhyun Kim, Minkeun Kwak, Hyungsam Choi, Chansam Chang, Yongchul Kim, Hong-Jae Shin, Nae-In Lee
Proceedings Volume 7273, 727314 (2009) https://doi.org/10.1117/12.814013
KEYWORDS: Head-mounted displays, Silicon, Photoresist processing, Coating, Lithography, Immersion lithography, Semiconducting wafers, Advanced distributed simulations, Carbon, Silicon carbide

Showing 5 of 10 publications
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