Mr. Tae-Hwang Jang
Engineer at Samsung Electronics Co Ltd
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 17, 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Manufacturing, Control systems, Data processing, Raster graphics, Mask making, Computer aided design, Critical dimension metrology, Data conversion, Vestigial sideband modulation, Resolution enhancement technologies

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