TaeSun Kim
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Diffraction, Metrology, Logic, Scanning electron microscopy, Target acquisition, Semiconducting wafers, Performance modeling, Overlay metrology, Diffraction gratings

Proceedings Article | 29 March 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Lithography, Optical lithography, Image processing, Scanning electron microscopy, Photomasks, Ion implantation, Logic devices, Nanoimprint lithography, Photoresist processing, Chemically amplified resists

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