Taehyoung Lee
at Tongmyong Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | November 26, 2012
Proc. SPIE. 8557, Optical Design and Testing V
KEYWORDS: Lithography, Diffraction, Gaussian beams, Micromirrors, Photomasks, Maskless lithography, Digital micromirror devices, Line edge roughness, Imaging arrays, Binary data

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