Taejoo Hwang
at Rensselaer Polytechnic Institute
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 30, 2003
Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX
KEYWORDS: Microfluidics, Quantum wells, Glasses, Silicon, Photomasks, Deep reactive ion etching, Micromachining, Semiconducting wafers, HF etching, Wafer bonding

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