Taejun You
at SK Hynix Inc
SPIE Involvement:
Publications (11)

Proceedings Article | 15 March 2016 Paper
Taejun You, Taehyeong Lee, Gyun Yoo, Youngjoon Park, Cheolkyun Kim, Donggyu Yim
Proceedings Volume 9780, 97801E (2016) https://doi.org/10.1117/12.2219863
KEYWORDS: Semiconducting wafers, Photomasks, Critical dimension metrology, Reflection, Optical proximity correction, Optical lithography, Dry etching, Buildings, Lithography, Image processing, Data modeling, Visualization, Scanning electron microscopy, Antireflective coatings

Proceedings Article | 31 March 2014 Paper
Proceedings Volume 9052, 905220 (2014) https://doi.org/10.1117/12.2046577
KEYWORDS: Data modeling, Semiconducting wafers, 3D modeling, Etching, Chemical mechanical planarization, Scanning electron microscopy, Process modeling, Virtual reality, Wafer inspection, Calibration

Proceedings Article | 14 December 2009 Paper
Kiho Yang, Daejin Park, Jeonkyu Lee, Sangjin Oh, Jinhyuck Jeon, Taejun You, Chanha Park, Donggyu Yim, Sungki Park
Proceedings Volume 7520, 75202A (2009) https://doi.org/10.1117/12.837224
KEYWORDS: Optical proximity correction, Data modeling, Calibration, Lithography, Transistors, Semiconducting wafers, Polarization, Image processing, Process modeling, Scanners

Proceedings Article | 16 March 2009 Paper
Proceedings Volume 7274, 72742W (2009) https://doi.org/10.1117/12.814087
KEYWORDS: Polarization, Critical dimension metrology, Semiconducting wafers, Lithography, Optical lithography, Resolution enhancement technologies, Polarization control, Fiber optic illuminators, Semiconductors, Metrology

Proceedings Article | 4 December 2008 Paper
Proceedings Volume 7140, 714034 (2008) https://doi.org/10.1117/12.804646
KEYWORDS: SRAF, Diffractive optical elements, Resolution enhancement technologies, Photoresist processing, Lithography, Printing, Source mask optimization, Fiber optic illuminators, Semiconducting wafers, Optical lithography

Showing 5 of 11 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top