Taejun You
at SK Hynix Inc
SPIE Involvement:
Publications (11)

Proceedings Article | 15 March 2016 Paper
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Antireflective coatings, Optical lithography, Data modeling, Visualization, Reflection, Dry etching, Image processing, Scanning electron microscopy, Buildings, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 31 March 2014 Paper
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Data modeling, Calibration, Etching, 3D modeling, Scanning electron microscopy, Wafer inspection, Virtual reality, Semiconducting wafers, Process modeling, Chemical mechanical planarization

Proceedings Article | 14 December 2009 Paper
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Lithography, Data modeling, Polarization, Calibration, Image processing, Scanners, Transistors, Optical proximity correction, Semiconducting wafers, Process modeling

Proceedings Article | 16 March 2009 Paper
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Semiconductors, Lithography, Metrology, Optical lithography, Polarization, Critical dimension metrology, Polarization control, Semiconducting wafers, Resolution enhancement technologies, Fiber optic illuminators

Proceedings Article | 4 December 2008 Paper
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Lithography, Optical lithography, Diffractive optical elements, Printing, Source mask optimization, SRAF, Photoresist processing, Semiconducting wafers, Resolution enhancement technologies, Fiber optic illuminators

Showing 5 of 11 publications
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