Prof. Tai-Wook Kim Profile

Prof. Tai-Wook Kim

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Publications (3)

SPIE Journal Paper | 2 January 2014

Real-time critical dimension measurement of thin film transistor liquid crystal display patterns using optical coherence tomography

Sung-Hoon Park, Tai-Wook Kim, Jeong-Ho Lee, Heui Jae Pahk

JEI, Vol. 23, Issue 01, 013001, (January 2014) https://doi.org/10.1117/12.10.1117/1.JEI.23.1.013001

KEYWORDS: Tomography, Critical dimension metrology, Thin films, Transistors, LCDs, Coherence (optics), Imaging systems, Visibility, Fused deposition modeling, Overlay metrology

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SPIE Journal Paper | 14 September 2012

Novel, fast, edge-directed image reconstruction algorithm using a substepping system for critical-dimension measurement of glass panels

Nam Thai Doan, Jun-Hee Moon, Tai-Wook Kim, Heui Jae Pahk

JEI, Vol. 21, Issue 3, 033028, (September 2012) https://doi.org/10.1117/12.10.1117/1.JEI.21.3.033028

KEYWORDS: Lawrencium, Reconstruction algorithms, Glasses, Microscopes, Image processing, Imaging systems, Distance measurement, Image restoration, Objectives, Cameras

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Proceedings Article | 21 August 2009 Paper

Comparison of multilayer laser scribing of thin film solar cells with femto, pico, and nanosecond pulse durations

Tai-Wook Kim, Heui-Jae Pahk, Hee Park, David Hwang, Costas Grigoropoulos

Proceedings Volume 7409, 74090A (2009) https://doi.org/10.1117/12.826458

KEYWORDS: Pulsed laser operation, Amorphous silicon, Molybdenum, Copper indium disulfide, Picosecond phenomena, Laser ablation, Femtosecond phenomena, Resistance, Thin film solar cells, Glasses

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