Takaei Sasaki
Manager at ULVAC Coating Corp
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 8 November 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Thin films, Etching, Dry etching, Metals, Coating, Chromium, Photomasks, Absorbance, Critical dimension metrology, Binary data

Proceedings Article | 6 December 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Silica, Etching, Quartz, Dry etching, Reflectivity, Chromium, Transmittance, Photomasks, Mask making, Phase shifts

Proceedings Article | 28 August 2003
Proc. SPIE. 5130, Photomask and Next-Generation Lithography Mask Technology X
KEYWORDS: Semiconductors, Lithography, Etching, Dry etching, Magnetism, Chromium, Scanning electron microscopy, Photomasks, Helium, Plasma

Proceedings Article | 27 December 2002
Proc. SPIE. 4889, 22nd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Modulation, Etching, Dry etching, Control systems, Photomasks, Antennas, Photoresist processing, Plasma

Proceedings Article | 11 March 2002
Proc. SPIE. 4562, 21st Annual BACUS Symposium on Photomask Technology
KEYWORDS: Packaging, Polymers, Control systems, Scanning electron microscopy, Photomasks, Compact discs, Critical dimension metrology, Thin film coatings, Environmental sensing, Chemically amplified resists

Proceedings Article | 5 September 2001
Proc. SPIE. 4409, Photomask and Next-Generation Lithography Mask Technology VIII
KEYWORDS: Semiconductors, Modulation, Etching, Dry etching, Magnetism, Photomasks, Antennas, Critical dimension metrology, Photoresist processing, Plasma

Showing 5 of 13 publications
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