Takahiro Kitano
Director at Tokyo Electron Ltd
SPIE Involvement:
Author
Publications (28)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11612, Advances in Patterning Materials and Processes XXXVIII

Proceedings Article | 22 February 2021 Presentation
Proc. SPIE. 11610, Novel Patterning Technologies 2021
KEYWORDS: Lithography, Polymers, Directed self assembly, High volume manufacturing, Line edge roughness, Molecular self-assembly

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Directed self assembly

Proceedings Article | 25 March 2019 Presentation + Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Polymethylmethacrylate, Defect detection, Etching, Bridges, Directed self assembly, Extreme ultraviolet lithography, Picosecond phenomena, Semiconducting wafers, Stochastic processes, System on a chip

Proceedings Article | 19 March 2018 Presentation + Paper
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Lithography, Polymethylmethacrylate, Polymers, Bridges, Directed self assembly, Line edge roughness, Photoresist processing

Showing 5 of 28 publications
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