Dr. Takahiro Matsuo
Researcher at Panasonic Corp
SPIE Involvement:
Author
Publications (20)

PROCEEDINGS ARTICLE | September 24, 2012
Proc. SPIE. 8446, Ground-based and Airborne Instrumentation for Astronomy IV
KEYWORDS: Telescopes, Stars, Thirty Meter Telescope, Spectroscopy, Adaptive optics, Spectral resolution, Spatial resolution, Planets, Galactic astronomy, James Webb Space Telescope

PROCEEDINGS ARTICLE | May 16, 2008
Proc. SPIE. 7004, 19th International Conference on Optical Fibre Sensors
KEYWORDS: Tunable lasers, Gas sensors, Cladding, Molecules, Nitrogen, Lamps, Ion beams, Laser cutting, Geometrical optics, Absorption

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Optical lithography, Quartz, Water, Crystals, Ions, Surface roughness, Immersion lithography, Analytical research, Semiconducting wafers

PROCEEDINGS ARTICLE | May 12, 2004
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Thin films, Lithography, Quartz, Printing, Transmittance, Photomasks, Critical dimension metrology, Halftones, Semiconducting wafers, Resolution enhancement technologies

PROCEEDINGS ARTICLE | June 26, 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Lithography, Phase shifting, Optical lithography, Printing, Photomasks, Image enhancement, Critical dimension metrology, Semiconducting wafers, Resolution enhancement technologies, Phase shifts

PROCEEDINGS ARTICLE | June 26, 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Lithography, Reticles, Lithographic illumination, Opacity, Photomasks, Image enhancement, Logic devices, Critical dimension metrology, Resolution enhancement technologies, Phase shifts

Showing 5 of 20 publications
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