Takahito Chibana
Engineer at Canon Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 7 March 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Contamination, Deep ultraviolet, Water, Particles, Inspection, Bridges, Scanning probe microscopy, Semiconducting wafers, Liquids, Defect inspection

Proceedings Article | 26 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Contamination, Water, Particles, Inspection, Control systems, Bridges, Transmittance, Semiconducting wafers, Pulsed laser operation, Defect inspection

Proceedings Article | 15 March 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Contamination, Water, Scanners, Particles, Laser irradiation, Transmittance, Immersion lithography, Semiconducting wafers, Liquids, Defect inspection

Proceedings Article | 12 May 2005
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Microfluidics, Optical lithography, Contamination, Water, Scanners, Control systems, Transmittance, Immersion lithography, Semiconducting wafers, Temperature metrology

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top