Takahito Kumazaki
at Gigaphoton Inc
SPIE Involvement:
Author
Publications (25)

Proceedings Article | 16 November 2018
Proc. SPIE. 10805, Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference
KEYWORDS: Optical components, Microscopes, Laser induced damage, Crystals, Calcium, Laser scattering, Atomic force microscopy, Digital image correlation, Excimer lasers, Surface finishing

Proceedings Article | 20 March 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Electrodes, Laser applications, Excimer lasers, Diffraction gratings

Proceedings Article | 24 March 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Actuators, Refractive index, Optical lithography, Nitrogen, Wavefronts, Control systems, Thermal effects, Excimer lasers, Immersion lithography, Helium, Critical dimension metrology, Yield improvement, Diffraction gratings

Proceedings Article | 24 March 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Actuators, Refractive index, Image processing, Gases, Nitrogen, Wavefronts, Gas lasers, Image enhancement, Excimer lasers, Immersion lithography, Image contrast enhancement, Helium, Neon, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 15 March 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Actuators, Optical components, Lithography, Optical lithography, Laser applications, Laser development, Control systems, Gas lasers, Excimer lasers, Immersion lithography, Helium, Neon, Semiconducting wafers

Proceedings Article | 15 March 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Optical components, Lithography, Refractive index, Optical lithography, Deep ultraviolet, Nitrogen, Wavefronts, Thermal effects, Excimer lasers, Immersion lithography, Helium, Algorithm development, Diffraction gratings

Showing 5 of 25 publications
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