Takahito Kumazaki
at Gigaphoton Inc
SPIE Involvement:
Author
Publications (27)

Proceedings Article | 9 April 2020 Paper
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Chromatic aberrations, Lithography, Light sources, Optical lithography, Copper indium disulfide, Scanners, Electroluminescence, Projection systems, Photomasks, Semiconducting wafers

Proceedings Article | 20 November 2019 Paper
Proc. SPIE. 11173, Laser-induced Damage in Optical Materials 2019
KEYWORDS: Semiconductors, Lithography, Light sources, Laser induced damage, Coating, Laser applications, Laser development, Excimer lasers, Laser damage threshold, Pulsed laser operation

Proceedings Article | 16 November 2018 Presentation + Paper
Proc. SPIE. 10805, Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference
KEYWORDS: Optical components, Microscopes, Laser induced damage, Crystals, Calcium, Laser scattering, Atomic force microscopy, Digital image correlation, Excimer lasers, Surface finishing

Proceedings Article | 20 March 2018 Paper
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Electrodes, Laser applications, Excimer lasers, Diffraction gratings

Proceedings Article | 24 March 2017 Paper
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Actuators, Refractive index, Optical lithography, Nitrogen, Wavefronts, Control systems, Thermal effects, Excimer lasers, Immersion lithography, Helium, Critical dimension metrology, Yield improvement, Diffraction gratings

Showing 5 of 27 publications
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