Prof. Takamaro Kikkawa
Professor at Hiroshima Univ
SPIE Involvement:
Author
Publications (7)

SPIE Journal Paper | 13 June 2018
JMI Vol. 5 Issue 02
KEYWORDS: Breast cancer, Tumors, Breast, Sensors, Prototyping, Antennas, Mammography, Domes, Breast imaging, Inspection

Proceedings Article | 17 November 2005 Paper
Proc. SPIE. 6002, Nanofabrication: Technologies, Devices, and Applications II
KEYWORDS: Silica, Metals, Copper, Dielectrics, Silicon, Plasma etching, Chemical reactions, Semiconducting wafers, Electroplating, Chemical mechanical planarization

Proceedings Article | 17 November 2005 Paper
Proc. SPIE. 6002, Nanofabrication: Technologies, Devices, and Applications II
KEYWORDS: Carbon, Refractive index, Silica, Dielectrics, Silicon, Transmission electron microscopy, Sol-gels, Head-mounted displays, Cesium, Plasma treatment

Proceedings Article | 19 January 2005 Paper
Proc. SPIE. 5592, Nanofabrication: Technologies, Devices, and Applications
KEYWORDS: Oxides, Silica, Copper, Dielectrics, Silicon, Bioalcohols, Transmission electron microscopy, Head-mounted displays, Semiconducting wafers, Back end of line

Proceedings Article | 19 January 2005 Paper
Proc. SPIE. 5592, Nanofabrication: Technologies, Devices, and Applications
KEYWORDS: Lithography, Optical lithography, Ultraviolet radiation, Molecules, Dielectrics, Silicon, Ultrasonics, Scanning electron microscopy, Photomicroscopy, Semiconducting wafers

Showing 5 of 7 publications
Proceedings Volume Editor (1)

Conference Committee Involvement (3)
Nanofabrication: Technologies, Devices, and Applications II
23 October 2005 | Boston, MA, United States
Nanofabrication: Technologies, Devices, and Applications
25 October 2004 | Philadelphia, Pennsylvania, United States
Submicrometer Metallization: The Challenges, Opportunities, and Limitations
23 September 1992 | San Jose, CA, United States
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