Dr. Takanori Katoh
Researcher at Sumitomo Heavy Industries Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 January 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Etching, Crystals, Microfabrication, Synchrotron radiation, Fluorine, FT-IR spectroscopy, Solid state physics, Spectroscopy, Molecules, Signal detection

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top