Dr. Takanori Kudo
Staff Scientist at EMD Performance Materials Corp
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Author
Publications (33)

Proceedings Article | 25 March 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Optical lithography, Polymers, Coating, Thin film coatings, Semiconducting wafers

Proceedings Article | 27 March 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Lithography, Optical lithography, Polymers, Photons, Electrons, Printing, Photomasks, Extreme ultraviolet, Absorbance, Extreme ultraviolet lithography

Proceedings Article | 27 March 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Carbon, Etching, Polymers, Silicon, Coating, Resistance, Photomasks, Plasma etching, Semiconducting wafers, System on a chip

Proceedings Article | 29 March 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Electron beam lithography, Etching, Polymers, Coating, Photoresist materials, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Semiconducting wafers, Absorption

Proceedings Article | 31 March 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Lithography, Etching, Polymers, Silicon, Coating, Fourier transforms, Plasma etching, 193nm lithography, Plasma, Bottom antireflective coatings

Proceedings Article | 11 December 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Lithography, Etching, Polymers, Silicon, Fourier transforms, Scanning electron microscopy, Plasma etching, Semiconducting wafers, Plasma, Bottom antireflective coatings

Showing 5 of 33 publications
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