Takashi Fukushige
at Tokyo Institute of Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Microelectromechanical systems, Actuators, Thin films, Multilayers, Electrodes, Glasses, Crystals, 3D modeling, Liquid crystals, Liquids

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