Dr. Takashi Fuse Profile

Dr. Takashi Fuse

Engineer at Tokyo Electron AT Ltd

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Publications (2)

Proceedings Article | 20 March 2008 Paper

Shaped beam technique using a novel 3rd-order imaging approach

Tadashi Kotsugi, Takashi Fuse, Hidetoshi Kinoshita, N. William Parker

Proceedings Volume 6921, 69211V (2008) https://doi.org/10.1117/12.771753

KEYWORDS: Beam shaping, Semiconducting wafers, Electron beam direct write lithography, Objectives, Monochromatic aberrations, Solids, Electron beams, Ray tracing, Image processing, Silicon

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Proceedings Article | 20 March 2008 Paper

Simulation of robustness of a new e-beam column with the 3rd-order imaging technique

K. Takeya, T. Fuse, H. Kinoshita, N. William Parker

Proceedings Volume 6921, 69212J (2008) https://doi.org/10.1117/12.771754

KEYWORDS: Electrodes, Tolerancing, Beam shaping, Semiconducting wafers, Lenses, Manufacturing, Gaussian beams, Error analysis, Optical components, Imaging systems

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