Takashi Makinoshima
at Mitsubishi Gas Chemical Co Inc
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Resistance, System on a chip, Carbon, Semiconducting wafers, Chemical analysis, Chromatography, Etching, Silicon, Coating

PROCEEDINGS ARTICLE | March 27, 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Raw materials, Resistance, Carbon, Coating, Extreme ultraviolet, Lithography, Chemical mechanical planarization, System on a chip, Mechanics, Etching, Chromatography, Chemical analysis

PROCEEDINGS ARTICLE | March 21, 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: System on a chip, Resistance, Electroluminescence, Carbon, Etching, Chemical analysis, Chromatography, Coating, Plasma, Raw materials

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Industrial chemicals, Raw materials, Chemical analysis, Line edge roughness, Extreme ultraviolet lithography, Electron beam lithography, Semiconducting wafers, Lithography, Optical lithography, Scanning electron microscopy

PROCEEDINGS ARTICLE | March 27, 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Extreme ultraviolet lithography, Chemical analysis, Industrial chemicals, Line edge roughness, Electron beam lithography, Semiconducting wafers, Optical lithography, Raw materials, Scanning electron microscopy, Glasses

PROCEEDINGS ARTICLE | March 29, 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Chemical analysis, Industrial chemicals, Raw materials, Line edge roughness, Extreme ultraviolet lithography, Electron beam lithography, Semiconducting wafers, Glasses, Chromatography, Scanning electron microscopy

Showing 5 of 6 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top