Takashi Maruyama
Group Manager at e-Shuttle Inc
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 26 March 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Mirrors, Logic, Lithium, Metals, Logic devices, High volume manufacturing, Analog electronics, Electron beam direct write lithography, Semiconducting wafers, System on a chip

Proceedings Article | 21 March 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Lithography, Electron beams, Logic, Modulation, Backscatter, Scattering, Laser scattering, Photomasks, Critical dimension metrology, Electron beam direct write lithography

Proceedings Article | 21 March 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Information fusion, Semiconductors, Logic, Logic devices, High volume manufacturing, Chemical elements, Analog electronics, Multiplexers, Electron beam direct write lithography, Semiconducting wafers

Proceedings Article | 21 March 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Lithography, Logic, Etching, Metals, Manufacturing, Scanning electron microscopy, Double patterning technology, Electron beam direct write lithography, Tolerancing, Vestigial sideband modulation

Proceedings Article | 21 March 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Lithography, Optical lithography, Diffusion, Manufacturing, Scanning electron microscopy, Monte Carlo methods, High volume manufacturing, Photoresist processing, Beam analyzers, Chemically amplified resists

Proceedings Article | 3 April 2010
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Lithography, Logic, Photomasks, Extreme ultraviolet, High volume manufacturing, Analog electronics, Electron beam direct write lithography, Semiconducting wafers, Vestigial sideband modulation, Information operations

Showing 5 of 8 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top