Dr. Takashi Matsunaga
Executive officer at Gigaphoton Inc
SPIE Involvement:
Author
Publications (29)

Proceedings Article | 26 April 2017 Presentation
Toshihiro Oga, Kenji Takahisa, Takashi Matsunaga, Tatsuo Enami
Proceedings Volume 10147, 101470D (2017) https://doi.org/10.1117/12.2257955
KEYWORDS: Lithography, Chromatic aberrations, Immersion lithography, Optical proximity correction, Light sources, Optical systems, Wafer-level optics, Projection systems, Optical design, Semiconducting wafers

Proceedings Article | 24 March 2017 Paper
Proceedings Volume 10147, 101471O (2017) https://doi.org/10.1117/12.2257972
KEYWORDS: Gas lasers, Excimer lasers, Neon, Semiconductor manufacturing, Lithography, Beam controllers, Xenon, Deep ultraviolet, Light sources, Molecules, Laser systems engineering, Sustainable technology, Prototyping, Pulsed laser operation, Laser stabilization

Proceedings Article | 24 March 2017 Paper
Proceedings Volume 10147, 101471N (2017) https://doi.org/10.1117/12.2257960
KEYWORDS: Helium, Actuators, Optical lithography, Excimer lasers, Immersion lithography, Yield improvement, Wavefronts, Critical dimension metrology, Refractive index, Nitrogen, Thermal effects, Diffraction gratings, Control systems

Proceedings Article | 24 March 2017 Presentation + Paper
Proceedings Volume 10147, 1014719 (2017) https://doi.org/10.1117/12.2257959
KEYWORDS: Neon, Helium, Gases, Image processing, Nitrogen, Immersion lithography, Gas lasers, Image contrast enhancement, Image enhancement, Excimer lasers, Actuators, Wavefronts, Refractive index, Semiconducting wafers, Critical dimension metrology

Proceedings Article | 22 February 2017 Presentation + Paper
Proceedings Volume 10097, 100970T (2017) https://doi.org/10.1117/12.2250706
KEYWORDS: Excimer lasers, Deep ultraviolet, Materials processing, High power lasers, Laser processing, Solid state lasers, Semiconductor manufacturing, Reliability, Annealing, Glasses, Laser ablation, Scanning electron microscopy, Infrared lasers, Micromachining, Copper

Showing 5 of 29 publications
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