Dr. Takashi Saitou
Director and Senior Executive Officer at Gigaphoton Inc
SPIE Involvement:
Author
Publications (47)

Proceedings Article | 10 April 2024 Poster
Proceedings Volume PC12953, PC129530T (2024) https://doi.org/10.1117/12.3009787
KEYWORDS: Light sources, Semiconducting wafers, Vacuum chambers, Laser stabilization, Design and modelling, Acoustic waves, Power supplies, Power consumption, Optical components, Dose control

Proceedings Article | 10 April 2024 Presentation
Proceedings Volume PC12953, PC129530C (2024) https://doi.org/10.1117/12.3009784
KEYWORDS: Scanners, Speckle, Deep ultraviolet, Yield improvement, Optical components, Semiconductors, Semiconducting wafers, Pulsed laser operation, Lithography, Line edge roughness

Proceedings Article | 10 April 2024 Poster + Paper
Fumio Iwamoto, Yoshifumi Ueno, Shinji Nagai, Kenichi Miyao, Hideyuki Hayashi, Takuya Ishii, Tamotsu Abe, Hiroaki Nakarai, Takashi Saito
Proceedings Volume 12953, 1295313 (2024) https://doi.org/10.1117/12.3010135
KEYWORDS: Extreme ultraviolet, Tin, Light sources, Inspection, Plasma, Collector mirrors, Plasma generation, Control systems, Laser irradiation, Reliability

Proceedings Article | 10 April 2024 Poster
Proceedings Volume PC12953, PC129530S (2024) https://doi.org/10.1117/12.3008944
KEYWORDS: Speckle, Line width roughness, Semiconductors, Scanners, Lithography, Light sources, Chromatic aberrations

Proceedings Article | 10 April 2024 Poster
Proceedings Volume PC12953, PC129530U (2024) https://doi.org/10.1117/12.3009846
KEYWORDS: Telecommunications, Standards development, Machine learning, Light sources, Data analysis, Speckle, Semiconductor manufacturing, Optics manufacturing, Instrument modeling, Immersion lithography

Showing 5 of 47 publications
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