Takashi Sasaki
at AGC Inc.
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 26 March 2008 Paper
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Lithography, Etching, Chemical species, Polymers, Spectroscopy, Polymerization, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Fluorine

Proceedings Article | 26 March 2008 Paper
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Lithography, Sputter deposition, Polymers, Interfaces, Ions, Scanning electron microscopy, Polymerization, Immersion lithography, Photoresist processing, Polymer thin films

Proceedings Article | 2 April 2007 Paper
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Optical lithography, Polymers, Scanning electron microscopy, Polymerization, Immersion lithography, Thin film coatings, Fluorine, Semiconducting wafers, Polymer thin films

Proceedings Article | 2 April 2007 Paper
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Imaging systems, Polymers, Coating, Polymerization, Immersion lithography, Fluorine, Photoresist processing, Semiconducting wafers, Polymer thin films

Proceedings Article | 29 March 2006 Paper
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Transparency, Etching, Dry etching, Polymers, Diffusion, Resistance, Immersion lithography, Fluorine, Absorption

Showing 5 of 8 publications
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