Dr. Takayuki Funatsu
Graduate Student at Nikon Corp
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Reticles, Optical parametric oscillators, Scanners, Wavefronts, Distortion, Software development, Transmittance, High volume manufacturing, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Wafer-level optics, Reticles, Data modeling, Calibration, Scanners, Wavefronts, Control systems, Distortion, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | December 30, 2008
Proc. SPIE. 7132, Laser-Induced Damage in Optical Materials: 2008
KEYWORDS: Thin films, Atmospheric plasma, Silica, Glasses, Silicon, Lamps, Oxygen, Excimers, Tolerancing, Plasma

PROCEEDINGS ARTICLE | January 15, 2007
Proc. SPIE. 6403, Laser-Induced Damage in Optical Materials: 2006
KEYWORDS: Silica, Glasses, Ultraviolet radiation, Silicon, Lamps, Oxygen, Xenon, Transmittance, Epoxies, Adhesives

PROCEEDINGS ARTICLE | February 7, 2006
Proc. SPIE. 5991, Laser-Induced Damage in Optical Materials: 2005
KEYWORDS: Refractive index, Silica, Glasses, Silicon, Coating, Lamps, Semiconductor lasers, Xenon, Excimers, Hard coatings

PROCEEDINGS ARTICLE | February 21, 2005
Proc. SPIE. 5647, Laser-Induced Damage in Optical Materials: 2004
KEYWORDS: Mirrors, Silica, Glasses, Ultraviolet radiation, Silicon, Lamps, Oxygen, Xenon, Transmittance, Excimers

Showing 5 of 7 publications
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