Dr. Takayuki Ohta
Assistant Professor at Wakayama Univ
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 7 March 2007
Proc. SPIE. 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
KEYWORDS: Optical lithography, Polymethylmethacrylate, Resonators, Reflection, Etching, Crystals, Silicon, Semiconducting wafers, Micro optical resonators, Anisotropic etching

Proceedings Article | 6 December 2005
Proc. SPIE. 6050, Optomechatronic Micro/Nano Devices and Components
KEYWORDS: Mirrors, Fabry–Perot interferometers, Ferroelectric materials, Fabry–Perot interferometry, Interferometers, Quartz, Sputter deposition, Dielectrics, Reflectivity, Scanning electron microscopy

Proceedings Article | 6 December 2005
Proc. SPIE. 6050, Optomechatronic Micro/Nano Devices and Components
KEYWORDS: Optical fibers, Optical components, Electron beams, Etching, Argon, Ions, Micromachining, Plasma generation, Plasma, Protactinium

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