Dr. Takayuki Ohta Profile

Dr. Takayuki Ohta

Assistant Professor at Wakayama Univ

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Publications (3)

Proceedings Article | 7 March 2007

The silicon mold fabrication of a kind of micro-optical resonator and coupler

Hui Ju, Takayuki Ohta, Satoru Takao, Masafumi Ito, Minoru Sasaki, Kazuhiro Hane, Masaru Hori

Proc. SPIE. 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII

KEYWORDS: Optical lithography, Polymethylmethacrylate, Resonators, Reflection, Etching, Crystals, Silicon, Semiconducting wafers, Micro optical resonators, Anisotropic etching

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Proceedings Article | 6 December 2005

Small quartz mirrors with high reflectance and design of a kind of micro Fabry Perot interferometer

Hui Ju, Kenji Sato, Takayuki Ohta, Keiichi Nakamula, Takeaki Hattori, Kunihiko Souma, Daigo Ichinose, Takasi Kotani, Masafumi Ito

Proc. SPIE. 6050, Optomechatronic Micro/Nano Devices and Components

KEYWORDS: Mirrors, Fabry–Perot interferometers, Ferroelectric materials, Fabry–Perot interferometry, Interferometers, Quartz, Sputter deposition, Dielectrics, Reflectivity, Scanning electron microscopy

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Proceedings Article | 6 December 2005

SiO₂ etching for optical device using pulse-modulated electron-beam-excited plasma

Takayuki Ohta, Masafumi Ito, Keigo Takeda, Masaru Hori

Proc. SPIE. 6050, Optomechatronic Micro/Nano Devices and Components

KEYWORDS: Optical fibers, Optical components, Electron beams, Etching, Argon, Ions, Micromachining, Plasma generation, Plasma, Protactinium

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