Takayuki Takano
at AIST
SPIE Involvement:
Author
Publications (9)

SPIE Journal Paper | 1 July 2009
JM3 Vol. 8 Issue 03
KEYWORDS: X-rays, Photomasks, Polymethylmethacrylate, X-ray lithography, Silicon, Scanning electron microscopy, X-ray technology, Nickel, X-ray imaging, Self-assembled monolayers

Proceedings Article | 24 July 2008
Proc. SPIE. 7021, High Energy, Optical, and Infrared Detectors for Astronomy III
KEYWORDS: Gold, Sensors, Etching, X-rays, Silicon, Photoresist materials, Deep reactive ion etching, X-ray astronomy, Semiconducting wafers, X-ray technology

Proceedings Article | 9 January 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Microelectromechanical systems, Oxides, Databases, Etching, Silicon, Photoresist materials, Photomasks, Deep reactive ion etching, Semiconducting wafers, Plasma

Proceedings Article | 9 January 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Polymethylmethacrylate, Etching, X-rays, Nickel, Silicon, Scanning electron microscopy, Photomasks, Photoresist processing, X-ray lithography, X-ray technology

SPIE Journal Paper | 1 January 2008
JM3 Vol. 7 Issue 01

Showing 5 of 9 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top