Takayuki Yabu
at Gigaphoton Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 3, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Semiconductors, Mirrors, Light sources, Magnetism, Gas lasers, Extreme ultraviolet, Picosecond phenomena, Plasma, Tin

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Mirrors, Light sources, Carbon dioxide lasers, Solid state lasers, Magnetism, Control systems, Laser stabilization, Extreme ultraviolet, Pulsed laser operation, Tin

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