Mr. Takemi Asai Profile

Takemi Asai

at Tohoku Univ

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Publications (3)

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Proceedings Article | 28 December 2010 Paper

Edge profile measurement of micro-cutting tools on a diamond turning machine

T. Asai, S. H. Jang, Y. Arai, W. Gao

Proceedings Volume 7544, 75440J (2010) https://doi.org/10.1117/12.885660

KEYWORDS: Nose, Optical alignment, Optical sensors, 3D metrology, Atomic force microscopy, Sensors, Micro cutting, Diamond turning, Diamond machining, Scanning electron microscopy

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Single crystal diamond micro-cutting tools, which are used for fabrication of precision micro-parts, have very sharp tool edges with radii in the range of tens of nanometers or even nanometers. Although there are many types of tools, the tools with a rounded nose are treated in this paper. They can be used for fabrication of very smooth and accurate surface with 3D micro structures such as micro-lens arrays, diffractive optical elements and so on. The machined quality is highly depending on the tool edges' states and it is desired to manage them. This paper presents a measuring instrument based on atomic force microscope (AFM), which is designed and constructed for on-machine measurement of the cutting edge profile. It is a combination of an AFM probe unit for 3D edge profile measurement and an alignment system with an optical sensor for aligning the probe-tip with the tool's edge top so that the measurement can be carried out in a short time. Measurement experiments of micro-tools with (nominal) nose radii of 8 μm and 0.2 mm are summarized to show the performance of the instrument. And the nose radii were evaluated as 7.2 μm and 0.188 mm, respectively.

Proceedings Article | 12 January 2009 Paper

Compensation of motion error in a high accuracy AFM

Yuguo Cui, Yoshikazu Arai, Gaofa He, Takemi Asai, Wei Gao

Proceedings Volume 7133, 71334H (2009) https://doi.org/10.1117/12.810123

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An atomic force microscope (AFM) system is used for large-area measurement with a spiral scanning strategy, which is composed of an air slide, an air spindle and a probe unit. The motion error which is brought from the air slide and the air spindle will increase with the increasing of the measurement area. Then the measurement accuracy will decrease. In order to achieve a high speed and high accuracy measurement, the probe scans along X-direction with constant height mode driven by the air slide, and at the same time, based on the change way of the motion error, it moves along Zdirection conducted by piezoactuator. According to the above method of error compensation, the profile measurement experiment of a micro-structured surface has been carried out. The experimental result shows that this method is effective for eliminating motion error, and it can achieve high speed and precision measurement of micro-structured surface.

Proceedings Article | 12 January 2009 Paper

Nanometric edge profile measurement of cutting tools on a diamond turning machine

Takemi Asai, Yoshikazu Arai, Yuguo Cui, Wei Gao

Proceedings Volume 7133, 713314 (2009) https://doi.org/10.1117/12.807623

Read Abstract +

Single crystal diamond tools are used for fabrication of precision parts [1-5]. Although there are many types of tools that are supplied, the tools with round nose are popular for machining very smooth surfaces. Tools with small nose radii, small wedge angles and included angles are also being utilized for fabrication of micro structured surfaces such as microlens arrays [6], diffractive optical elements and so on. In ultra precision machining, tools are very important as a part of the machining equipment. The roughness or profile of machined surface may become out of desired tolerance. It is thus necessary to know the state of the tool edge accurately. To meet these requirements, an atomic force microscope (AFM) for measuring the 3D edge profiles of tools having nanometer-scale cutting edge radii with high resolution has been developed [7-8]. Although the AFM probe unit is combined with an optical sensor for aligning the measurement probe with the tools edge top to be measured in short time in this system, this time only the AFM probe unit was used. During the measurement time, that was attached onto the ultra precision turning machine to confirm the possibility of profile measurement system.

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