Takeo Omori
at Nikon Corp
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 May 2005 Paper
Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599178
KEYWORDS: Polarization, Birefringence, Image processing, Dielectrics, Inspection, Reflectivity, Semiconducting wafers, Wafer testing, Dielectric polarization

Proceedings Article | 2 June 2000 Paper
Toshiaki Kitamura, Yasuharu Nakajima, Hiroyuki Matsumoto, Takeo Omori, Koichiro Komatsu
Proceedings Volume 3998, (2000) https://doi.org/10.1117/12.386514
KEYWORDS: Wafer-level optics, Diffraction, Defect detection, Imaging systems, Image processing, Inspection, Wafer inspection, Photoresist processing, Semiconducting wafers, Defect inspection

Proceedings Article | 14 June 1999 Paper
Koichiro Komatsu, Takeo Omori, Toshiaki Kitamura, Yasuharu Nakajima, Arun Aiyer, Kyoichi Suwa
Proceedings Volume 3677, (1999) https://doi.org/10.1117/12.350863
KEYWORDS: Wafer-level optics, Defect detection, Cameras, Particles, Light scattering, Inspection, Fourier transforms, CCD cameras, Wafer inspection, Semiconducting wafers

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