Prof. Takeo Watanabe
Professor at Univ of Hyogo
SPIE Involvement:
Author
Publications (60)

PROCEEDINGS ARTICLE | October 3, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Multilayers, Polarization, Reflectivity, Polarizers, Reflectometry, Extreme ultraviolet, Extreme ultraviolet lithography, Polarization control

PROCEEDINGS ARTICLE | October 3, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Oxides, Contamination, Nanoparticles, Metals, Particles, Mass spectrometry, Extreme ultraviolet, Extreme ultraviolet lithography

PROCEEDINGS ARTICLE | October 3, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Polymethylmethacrylate, Deep ultraviolet, Silicon, Coating, Photodiodes, Reflectometry, Transmittance, Extreme ultraviolet, Extreme ultraviolet lithography, Absorption

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Polymers, Metals, Diffusion, Transmittance, Extreme ultraviolet, Extreme ultraviolet lithography, Tellurium, Prototyping, Tin, Absorption

PROCEEDINGS ARTICLE | October 26, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Polymers, Metals, Diffusion, Transmittance, Extreme ultraviolet, Extreme ultraviolet lithography, Tellurium, Prototyping, Tin, Absorption

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Lithography, Extreme ultraviolet, Extreme ultraviolet lithography, Absorption

Showing 5 of 60 publications
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