Prof. Takeo Watanabe
Director, Professor at Univ of Hyogo
SPIE Involvement:
Author
Publications (61)

Proceedings Article | 26 September 2019
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Mirrors, Ultraviolet radiation, Reflectometry, Extreme ultraviolet, Extreme ultraviolet lithography, Synchrotrons, Monochromators, Vacuum ultraviolet, Plasma, Light

Proceedings Article | 3 October 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Multilayers, Polarization, Reflectivity, Polarizers, Reflectometry, Extreme ultraviolet, Extreme ultraviolet lithography, Polarization control

Proceedings Article | 3 October 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Polymethylmethacrylate, Deep ultraviolet, Silicon, Coating, Photodiodes, Reflectometry, Transmittance, Extreme ultraviolet, Extreme ultraviolet lithography, Absorption

Proceedings Article | 3 October 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Oxides, Contamination, Nanoparticles, Metals, Particles, Mass spectrometry, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 19 March 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Polymers, Metals, Diffusion, Transmittance, Extreme ultraviolet, Extreme ultraviolet lithography, Tellurium, Prototyping, Tin, Absorption

Showing 5 of 61 publications
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