Dr. Takeshi Iwai
at Tokyo Ohka Kogyo Co Ltd
SPIE Involvement:
Publications (12)

Proceedings Article | 5 March 2021 Presentation
Proceedings Volume 11686, 116860X (2021) https://doi.org/10.1117/12.2579591
KEYWORDS: Reflectors, Light emitting diodes, Resistance, Photonic crystals, External quantum efficiency, Absorption

Proceedings Article | 5 March 2019 Presentation
Proceedings Volume 10918, 109181V (2019) https://doi.org/10.1117/12.2505751
KEYWORDS: Reflectors, Light emitting diodes, Resistance, External quantum efficiency, Absorption, Photonic crystals

Proceedings Article | 30 March 2010 Paper
Taku Hirayama, Jun Iwashita, Sachiko Yoshizawa, Kenri Konno, Takeshi Iwai
Proceedings Volume 7639, 76390Q (2010) https://doi.org/10.1117/12.848439
KEYWORDS: Polymers, Stars, Lithography, Line width roughness, Polymer thin films, Extreme ultraviolet lithography, Diffusion, Semiconducting wafers, Nonlinear control, Lithographic illumination

Proceedings Article | 1 April 2009 Paper
Jun Iwashita, Takeyoshi Mimura, Taku Hirayama, Takeshi Iwai
Proceedings Volume 7273, 72733O (2009) https://doi.org/10.1117/12.813990
KEYWORDS: Polymers, Stars, Diffusion, Extreme ultraviolet lithography, Lithography, Extreme ultraviolet, Line width roughness, Polymerization, Semiconducting wafers, Polymer thin films

Proceedings Article | 1 April 2009 Paper
Proceedings Volume 7273, 72731X (2009) https://doi.org/10.1117/12.814066
KEYWORDS: Polymers, Extreme ultraviolet lithography, Extreme ultraviolet, Absorption, Chemically amplified resists, Absorbance, Image processing, Silicon, Ultraviolet radiation, Line width roughness

Showing 5 of 12 publications
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