Dr. Takeshi Kobayashi
at AIST
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | January 11, 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Microelectromechanical systems, Semiconductors, Photovoltaics, Ferroelectric materials, Optical sensors, Optical properties, Electrodes, Crystals, Scanning electron microscopy, Lead

PROCEEDINGS ARTICLE | January 9, 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Microelectromechanical systems, Gold, Confocal microscopy, Metals, Temperature sensors, Finite element methods, Microfabrication, Molybdenum, Sensor technology, Temperature metrology

PROCEEDINGS ARTICLE | January 5, 2006
Proc. SPIE. 6035, Microelectronics: Design, Technology, and Packaging II
KEYWORDS: Microelectromechanical systems, Semiconductors, Photovoltaics, Ferroelectric materials, Optical sensors, Optical properties, Crystals, Scanning electron microscopy, Lanthanum, Lead

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Microelectromechanical systems, Photovoltaics, Electrodes, Crystals, Ceramics, Scanning electron microscopy, Transducers, Photovoltaic materials, Lead, Perovskite

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Actuators, Mirrors, Ferroelectric materials, Etching, Electrodes, Silicon, Wavelength division multiplexing, Scanning electron microscopy, Micromirrors, Sol-gels

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