Taku Yamazaki
Deputy General Manager at Gigaphoton Inc
SPIE Involvement:
Author
Publications (22)

PROCEEDINGS ARTICLE | October 12, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Semiconductors, Lithography, Mirrors, Light sources, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Semiconductor manufacturing, Extreme ultraviolet lithography, High volume manufacturing

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Mirrors, Light sources, Laser development, Magnetism, Gas lasers, Extreme ultraviolet, Extreme ultraviolet lithography, Carbon monoxide, Plasma, Tin

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Light sources, Magnetism, Gas lasers, Extreme ultraviolet, Pulsed laser operation, Plasma, Tin

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Mirrors, Light sources, Carbon dioxide lasers, Solid state lasers, Magnetism, Control systems, Laser stabilization, Extreme ultraviolet, Pulsed laser operation, Tin

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Mirrors, Light sources, Laser development, Magnetism, Gas lasers, Extreme ultraviolet, Extreme ultraviolet lithography, Carbon monoxide, Plasma, Tin

PROCEEDINGS ARTICLE | March 27, 2017
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Lithography, Light sources, Laser development, Carbon dioxide lasers, Amplifiers, Gas lasers, Extreme ultraviolet, Extreme ultraviolet lithography, Carbon monoxide, Pulsed laser operation, Plasma, Tin

Showing 5 of 22 publications
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