Taku Yamazaki
Deputy General Manager at Gigaphoton Inc
SPIE Involvement:
Author
Publications (26)

Proceedings Article | 23 March 2020
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Semiconductors, Lithography, Light sources, Agriculture, Deep ultraviolet, Manufacturing, Amplifiers, Semiconductor manufacturing, Artificial intelligence, Light

Proceedings Article | 13 February 2020
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Semiconductors, Lithography, Light sources, Medicine, Agriculture, Surgery, Manufacturing, Software development, Semiconductor manufacturing, New and emerging technologies

Proceedings Article | 6 June 2019
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Mirrors, Light sources, Ions, Laser development, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Tin

Proceedings Article | 18 March 2019
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Wafer-level optics, Optical design, Electrodes, Manufacturing, Image resolution, Process control, Immersion lithography, Semiconducting wafers, Optics manufacturing, Yield improvement

Proceedings Article | 12 October 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Semiconductors, Lithography, Mirrors, Light sources, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Semiconductor manufacturing, Extreme ultraviolet lithography, High volume manufacturing

Showing 5 of 26 publications
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