Dr. Takuji Ishikawa
at Daikin Industries Ltd
SPIE Involvement:
Author
Publications (11)

PROCEEDINGS ARTICLE | April 4, 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Polymers, Water, Spectroscopy, Hydrogen, Surface properties, Polymerization, Infrared radiation, Immersion lithography, Manganese, Absorption

PROCEEDINGS ARTICLE | March 30, 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Refractive index, Antireflective coatings, Transparency, Quartz, Polymers, Water, Reflectivity, Fluorine, Standards development

PROCEEDINGS ARTICLE | March 29, 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Transparency, Quartz, Polymers, Water, Crystals, Absorbance, Immersion lithography, Fluorine, Standards development

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Transparency, Quartz, Polymers, Crystals, Polymerization, Photomasks, Immersion lithography, Fluorine, Standards development

PROCEEDINGS ARTICLE | May 14, 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Transparency, Polymers, Resistance, Absorbance, Line edge roughness, Chlorine, Fluorine, Industrial chemicals, Absorption

PROCEEDINGS ARTICLE | May 14, 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Transparency, Polymers, Photomasks, Absorbance, Fluorine, Polymer thin films, Standards development, Phase shifts, Absorption

Showing 5 of 11 publications
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