Takuma Yamamoto
at Hitachi High-Tech Corp
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV

Proceedings Article | 20 March 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Electron beams, Data modeling, 3D modeling, Scanning electron microscopy, Inverse problems, 3D metrology, Neural networks, Convolution

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: 3D acquisition, Scattering, Calibration, Nondestructive evaluation, Scanning electron microscopy, Monte Carlo methods, 3D metrology

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