Mr. Takuma Yasunami Profile

Takuma Yasunami

at Kyushu Univ.

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 17 March 2023 Poster + Paper

Yoshiaki Kakimoto, Keita Katayama, Takuma Yasunami, Tetsuya Goto, Daisuke Nakamura, Hiroshi Ikenoue

Proceedings Volume 12408, 124080M (2023) https://doi.org/10.1117/12.2651419

KEYWORDS: Silicon carbide, Laser irradiation, Doping, Resistance, Nitrogen, Excimer lasers, Diffusion, Surface roughness, Fabrication, Silicon

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Keywords/Phrases