Dr. Tamar Segal-Peretz
Assistant Professor at Technion - Israel Institute of Technology
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | August 22, 2018
JM3 Vol. 17 Issue 03
KEYWORDS: Directed self assembly, Polymethylmethacrylate, Picosecond phenomena, Tomography, System on a chip, Chemistry, Scanning transmission electron microscopy, Transmission electron microscopy, Semiconducting wafers, 3D image processing

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Polymethylmethacrylate, Chemistry, Transmission electron microscopy, Tomography, 3D metrology, Directed self assembly, Picosecond phenomena, Semiconducting wafers, System on a chip, Scanning transmission electron microscopy

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Nanostructures, Metrology, Polymethylmethacrylate, Etching, Polymers, Transmission electron microscopy, Tomography, Directed self assembly, Picosecond phenomena, Scanning transmission electron microscopy

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