Dr. Tamer Coskun
at
SPIE Involvement:
Author
Publications (19)

SPIE Journal Paper | August 12, 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Atrial fibrillation, Optical proximity correction, Lithography, Deep ultraviolet, SRAF, Linear filtering, Etching, Printing, Semiconducting wafers, Directed self assembly

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Lithography, Optical lithography, Atrial fibrillation, Deep ultraviolet, Etching, Linear filtering, Directed self assembly, Optical proximity correction, SRAF, Semiconducting wafers

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Lithography, Principal component analysis, Statistical analysis, Data modeling, Calibration, Error analysis, Uncertainty analysis, Optical proximity correction, Semiconducting wafers, Statistical modeling

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Detection and tracking algorithms, Deep ultraviolet, Etching, Computer simulations, Printing, Monte Carlo methods, Directed self assembly, Optical proximity correction, Optimization (mathematics)

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Optical lithography, Polymethylmethacrylate, Atrial fibrillation, Roentgenium, Etching, Polymers, Molecules, Computer simulations, Monte Carlo methods, Directed self assembly

PROCEEDINGS ARTICLE | March 18, 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Data modeling, Calibration, 3D modeling, Data processing, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

Showing 5 of 19 publications
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